Characterisation of sputter-ion pumps to be used in combination with non-evaporable getters
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Electronic ultra-high vacuum pump;Hall;Rev. Sci. Instrum.,1958
2. Pumping speed of sputter-ion pumps;Audi;Vacuum,1988
3. Sputter-ion Pumps – Measurement of Performance Characteristics;ISO/DIS 3556–1.2,1992
4. Monte Carlo computations on molecular flow in pumping speed test domes;Fischer;Vacuum,1967
5. A novel route to compact, high performance pumping in UHV-XHV vacuum systems;Manini;Vacuum,2013
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