Physical and electrical properties of nitrogen-doped hydrogenated amorphous carbon films
Author:
Funder
AiF
IGF
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference35 articles.
1. VDI Guide Line 2840, Carbon Films – Basic Knowledge, Film Types and Properties, VDI 2840:2012-06, Beuth Verlag GmbH.
2. Microstructures and mechanical properties of amorphous hydrogenated carbon-nitrogen films;Dworschak;Diam. Relat. Mater.,1994
3. Structure and mechanical properties of hard amorphous carbon-nitrogen films obtained by plasma decomposition of methane-ammonia mixtures;Freire;Thin Solid Films,1997
4. Hard a-C(N):H films obtained from plasma decomposition of methylamine-containing mixtures;Lacerda;Diamond Relat. Mater.,1997
5. Nitrogenated amorphous carbon as a semiconductor;Silva;Diam. Relat. Mater.,1996
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