Flat erosion magnetron sputtering with a moving unbalanced magnet
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference3 articles.
1. Self‐sputtering phenomena in high‐rate coaxial cylindrical magnetron sputtering
2. Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system
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