Influence of duct bias on deposition rate of DLC film in T-shape filtered arc deposition-Reference-Cited by-同舟云学术

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Influence of duct bias on deposition rate of DLC film in T-shape filtered arc deposition

Published:2006-09 Issue:11-12 Volume:80 Page:1266-1271
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Iwasaki Yasuhiro,Minamisawa Shinji,Takikawa Hirofumi,Sakakibara Tateki,Hasegawa Hiroshi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference17 articles.

1. Diamond-like carbon: state of the art

2. Diamond-like amorphous carbon

3. Applications of diamond-like carbon thin films

4. Physical–chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition

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1. Development of gas-injected pulsed plasma CVD method using Ar/C₂H₂ mixed gas for ultra-high-rate diamond-like carbon deposition;Japanese Journal of Applied Physics;2023-06-08

2. Ultra-high-rate deposition of diamond-like carbon films using Ar/C₂H₂ plasma jet CVD in combination with substrate-stage discharge;Japanese Journal of Applied Physics;2022-03-25

3. Nanotextured Mold Surface with DLC Coating for Reduction in Residual Ceramic Particles;Langmuir;2021-03-17

4. Improvement of drilling performance by overcoating diamond-like carbon films on diamond-coated drills for carbon fiber reinforced plastics processing;Vacuum;2021-01

5. Characterization of Hydrogen-Free and Hydrogenated DLC Films;Carbon Related Materials;2020-10-13

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