Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference45 articles.
1. A micromachined Pirani gauge with dual heat sinks;Chae;IEEE Trans. Adv. Packag.,2005
2. Miniaturized vacuum gauges;Wilfert;J. Vac. Sci. Technol.: Vacuum, Surfaces, and Films,2004
3. Pressure measurement from 1 atm to 0.01 Pa using a quartz oscillator;Kobayashi;Vacuum,1993
4. Comparison of hot cathode and cold cathode ionization gauges;Peacock;J. Vac. Sci. Technol.: Vacuum, Surfaces, and Films,1991
5. Compact wide-range cold-cathode gauges;Kendall;J. Vac. Sci. Technol.: Vacuum, Surfaces, and Films,2000