Design, development and characterization of MEMS silicon diaphragm force sensor-Reference-Cited by-同舟云学术

Design, development and characterization of MEMS silicon diaphragm force sensor

Published:2018-07 Issue: Volume:153 Page:211-216
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Kumar Rajesh,Rab Shanay,Pant B.D.,Maji S.

Funder

CSIR-NPL

CSIR-CEERI

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference26 articles.

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3. The development and characterization of a square ring shaped force transducer;Kumar;Meas. Sci. Technol.,2013

4. Long term uncertainty investigations of 1 MN force calibration machine at NPL, India (NPLI);Kumar;Meas. Sci. Rev.,2012

5. Design principles and considerations for the ‘ideal’ silicon piezore sistive pressure sensor: a focused review;Santosh Kumar;Microsyst. Technol.,2014

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