Optical emission spectroscopy study for nitrogen–acetylene–argon and nitrogen–acetylene–helium 100 kHz and dc discharges
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference29 articles.
1. Correlation of gas-phase composition and film properties in the plasma-enhanced chemical vapor deposition of hydrogenated amorphous carbon nitride films;Liu;J Appl Phys,2007
2. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursor;Barbadillo;J Electrochem Soc,2000
3. Influence of the power on the processes controlling the formation of ECR-CVD carbon nitride films from CH4/Ar/N2 plasmas;Camero;Plasma Sources Sci Technol,2004
4. Deposition of CNx thin films by plasma-activated chemical vapour deposition using various precursors as carbon source;Gruger;J Mater Sci,1997
5. Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition;Dorner-Reisela;Diam Relat Mater,2005
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