SiOx-doped DLC films: Charge transport, dielectric properties and structure-Reference-Cited by-同舟云学术

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SiOx-doped DLC films: Charge transport, dielectric properties and structure

Published:2008-02 Issue:6 Volume:82 Page:617-622
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Meškinis Š.,Šlapikas K.,Gudaitis R.,Tamulevičius S.,Kopustinskas V.,Guobienė A.,Niaura G.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference27 articles.

1. Diamond-like amorphous carbon

2. The insulating properties of a-C:H on silicon and metal substrates

3. Strong field charge transport in MIS structures based on low-K carbon films

4. Amorphous carbon nitride for high temperature capacitor dielectric

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