Author:
Lisovskiy V.A.,Artushenko K.P.,Yegorenkov V.D.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference67 articles.
1. Light Sources: Technologies and Applications;Kitsinelis,2011
2. The critical role of hydrogen for physical sputtering with Ar–H2 glow discharges
3. Handbook of Sputter Deposition Technology: Principles, Technology, and Applications;Wasa,1992
4. Sputtering Materials for VLSI and Thin Film Devices;Sarkar,2014
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