Author:
Grangeon F.,Monnin C.,Mangeard M.,Paulin D.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference4 articles.
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3. Rutherford SL. Miniature sputter-ion pump design considerations. 1999 NASA/JPL Miniature Vacuum Pumps Workshop—July 20–21; 1999.
4. Foundations of vacuum science and technology;Lafferty,1998
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