In-situ thermal cleaning of the sapphire substrate and temperature effect on epitaxial AlN
Author:
Funder
TÜBİTAK
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference51 articles.
1. Improved structural quality of AlN grown on sapphire by 3D/2D alternation growth;Guo;J. Cryst. Growth,2017
2. Influence of temperature and Al/N ratio on structural, chemical & electronic properties of epitaxial AlN films grown via PAMBE;Jain;Appl. Surf. Sci.,2018
3. Influence of the nucleation layer morphology on the structural property of AlN films grown on c-plane sapphire by MOCVD;Luo;J. Alloys Compd.,2017
4. Self-catalytic growth of AlN microrods on sapphire substrate;Kuppulingam;J. Cryst. Growth,2017
5. AlN MEMS filters with extremely high bandwidth widening capability;Gao;Microsystems & Nanoengineering,2020
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1. Study on a eco-friendly and efficient method for growing aluminum nitride whiskers;Vacuum;2023-04
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