Influence of precursor purge time on the performance of ZnO TFTs fabricated by atomic layer deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. The development of flexible integrated circuits based on thin-film transistors;Myny;Nat. Electr.,2018
2. Printable and flexible electronics: from TFTs to bioelectronic devices;Magliulo;J. Mater. Chem. C,2015
3. Flexible and implantable microelectrodes for chronically stable neural interfaces;Shi;Adv. Mater.,2019
4. Thread-like CMOS logic circuits enabled by reel-processed single-walled carbon nanotube transistors via selective doping;Heo;Adv. Mater.,2017
5. A transparent, smooth, thermally robust, conductive polyimide for flexible electronics;Spechler;Adv. Funct. Mater.,2015
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