Fabrication of semi-continuous profile Diffractive Optical Elements for beam shaping by Electron Beam Lithography-Reference-Cited by-同舟云学术

Fabrication of semi-continuous profile Diffractive Optical Elements for beam shaping by Electron Beam Lithography

Published:2000-06 Issue:1-4 Volume:53 Page:325-328
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Nottola A.,Gerardino A.,Gentili M.,Di Fabrizio E.,Cabrini S.,Melpignano P.,Rotaris G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Direct Writing of Continuous-Relief Micro-Optics;Gale,1997

2. Energy Density Function Determination in Very-High-Resolution Electron-Beam Lithography;Gentili;J. Vac. Sci. Technol. B,1990

3. Fabrication of Diffractive Optical Elements by Electron Beam Lithography;Di Fabrizio,1997

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