Author:
Madokoro Y.,Tomimatsu S.,Kawanami Y.,Umemura K.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Large area microcorrals and cavity formation on cantilevers using a focused ion beam;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09
2. Simulation of ion beam direct structuring for 3D nanoimprint template fabrication;Microelectronic Engineering;2006-04