Fabrication of buried quantum structures using FIB-MBE total vacuum process-Reference-Cited by-同舟云学术

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Fabrication of buried quantum structures using FIB-MBE total vacuum process

Published:1997-02 Issue:1-4 Volume:35 Page:451-454
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Wakaya F.,Yanagisawa J.,Matsubara T.,Nakayama H.,Yuba Y.,Takaoka S.,Murase K.,Gamo K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Formation of a high quality two‐dimensional electron gas on cleaved GaAs

2. Quasi‐one‐dimensional electron gas and its magnetic depopulation in a quantum wire prepared by overgrowth on a cleaved edge of AlGaAs/GaAs multiple quantum wells

3. Molecular beam epitaxy of GaAs/AlGaAs superlattice heterostructures on nonplanar substrates

4. Highly Uniform GaAs/AlAs Quantum Wires Grown on [001] Ridges of GaAs(100) Patterned Substrates by Molecular Beam Epitaxy

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Focused ion beam built-up on scanning electron microscopy with increased milling precision;Science China Physics, Mechanics and Astronomy;2012-03-13

2. Low energy focused ion beam system design;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-07

3. Effects of growth interruption in in situ process for buried quantum structures;Microelectronic Engineering;1998-03

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