Author:
Malmqvist L.,Bogdanov A.L.,Montelius L.,Hertz H.M.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks
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