Author:
Riedel Stephan,Röber Jürgen,Schulz Stefan E.,Geßner Thomas
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Advanced Metallization for ULSI Applications 1994;Röber,1995
2. Stresses in sputtered tungsten thin films
3. Thermal strain and stress in copper thin films
4. Formulas for Stress, Strain and Structural Matrices;Pilkey,1994
Cited by
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