Introduction to Silicon On Insulator materials and devices-Reference-Cited by-同舟云学术

Introduction to Silicon On Insulator materials and devices

Published:1997-12 Issue:1-4 Volume:39 Page:145-154
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Cristoloveanu Sorin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Electrical Characterization of SOI Materials and Devices;Cristoloveanu,1995

2. Wafer bonding technology for silicon-on-lnsulator applications: A review

3. IEEE Int. SOI Conf. Proc.;Mumola,1992

4. Silicon on insulator material technology

5. SOI Technology and Devices;Cristoloveanu,1996

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