Author:
Simon G.,Chen Y.,Haghiri-Gosnet A.M.,Decanini D.,Bourneix J.,Rousseaux F.,Launois H.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. Edge diffraction enhanced printability in x-ray nanolithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11