Micromachining and mechanical properties of GaInAs/InP microcantilevers
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
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3. A quantitative study of chemical etching of InP;Das Neves;J. Electrochem. Soc.,1993
4. J.A. Scheitz, Mechanical characterisation of thin films by micromechanical techniques, MRS Bulletin, 1992, pp. 34–45.
5. Mechanical stability and adhesion of microstrures under capillary forces part I and II;Mastrangelo;J. Micromech. System,1993
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