Reactively sputter-deposited Mo–Ox–Ny thin films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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5. Formation of Conductive SrVO3Films on Si Substrates
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1. Nitride or Oxynitride? Elucidating the Composition–Activity Relationships in Molybdenum Nitride Electrocatalysts for the Oxygen Reduction Reaction;Chemistry of Materials;2020-03-25
2. Microstructure, hardness and wear resistance of reactive sputtered Mo–O–N films on stainless steel substrate;Surface and Coatings Technology;2015-10
3. Synthesis, electron transport properties of transition metal nitrides and applications;Progress in Materials Science;2015-05
4. Surface characterization of Mo oxynitride films obtained by RF sputtering at various N2 ratios;Metals and Materials International;2013-01
5. Threshold Voltage Tunability of p-Channel Metal Oxide Semiconductor Field-Effect Transistor with Ternary HfxMoyNzMetal Gate and Gd2O3High-kGate Dielectric;Japanese Journal of Applied Physics;2010-04-20
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