A study of sputtering process for nanocrystalline FeAlN soft magnetic thin films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. The effects of deposition parameters on iron films RF diode sputtered in argon-nitrogen
2. The effect of annealing on the microstructure and magnetic properties of Fe-Ta-Cr-N thin films
3. Thin film tape recording heads with high moment FeAlN poles
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