Author:
Komeili Mojtaba,Menon Carlo
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering
Reference30 articles.
1. Introduction to Microelectromechanical Systems Engineering;Maluf,2004
2. Mechanics of Microelectromechanical Systems;Lobontiu,2005
3. Piezoelectric cantilever array for multi-probe scanning force microscopy;Iloh,1996
4. Enhanced mass sensing using torsional and lateral resonances in microcantilevers;Sharos;Appl. Phys. Lett.,2004
5. Thermally actuated microprobes for a new wafer probe card;Marcus;J. Microelectromech. Syst.,1999
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献