Dynamic pull-in instability of double-sided actuated nano-torsional switches

Author:

Sedighi Hamid M.,Shirazi Kourosh H.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Computational Mechanics

Reference30 articles.

1. Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions;Degani;Journal of Microelectromechanical Systems,2002

2. Dynamic stability of electrostatic torsional actuators with van der Waals effect;Guo;International Journal of Solids and Structures,2006

3. A low-voltage torsional actuator for application in RF-microswitches;Plötz;Sensors and Actuators A: Physical,2002

4. Influence of damping on the dynamical behavior of the electrostatic parallel-plate and torsional actuators with intermolecular forces;Lin;Sensors,2007

5. Instability analysis of torsional MEMS/NEMS actuators under capillary force;Guo;Journal of Colloid and Interface Science,2009

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