Experimental and computational study of gas flow delivered by a rectangular microchannels leak

Author:

Bergoglio M.,Mari D.,Chen J.,Si Hadj Mohand H.,Colin S.,Barrot C.

Funder

EMRP participants within EURAMET and the European Union

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference19 articles.

1. Leak rate metrology for the society and industry;Bergoglio;Measurement,2012

2. Leak detection, calibrations and reference flows: practical example;Calcatelli;Vacuum,2007

3. P. Lalonde, Etude expérimentale d’écoulements gazeux dans les microsystèmes à fluides PhD, Institut National des Sciences Appliquées de Toulouse, 2001.

4. INRIM primary standard for microgas-flow measurements with reference to atmospheric pressure;Bergoglio;Measurement,2012

5. INRIM continuous expansion system as high vacuum primary standard for gas pressure measurements below 9×10–2Pa;Bergoglio;Vacuum,2009

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