Calibrating nonlinearity coefficients of a nano-g accelerometer by dual-frequency excitation on a shaker
Author:
Funder
National Key Research and Development Program of China
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference47 articles.
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5. W.T. Pike, I.M. Standley, S.B. Calcutt, A.G. Mukherjee, A broad-band silicon microseismometer with 0.25 NG/rtHz performance, in: 2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, pp. 113–116. https://doi.org/10.1109/MEMSYS.2018.8346496.
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