Secondary ion mass spectrometry quantification of boron distribution in an array of silicon nanowires-Reference-Cited by-同舟云学术

Secondary ion mass spectrometry quantification of boron distribution in an array of silicon nanowires

Published:2023-04 Issue: Volume:211 Page:112630
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Michałowski Paweł Piotr^ORCID,Müller Jonas,Rossi Chiara^ORCID,Burenkov Alexander,Bär Eberhard,Larrieu Guilhem,Pichler Peter^ORCID

Funder

Horizon 2020

Horizon 2020 Framework Programme

European Union

Narodowe Centrum Badań i Rozwoju

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

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