Design and application of a micro-force measuring system based on the principle of torsion balance-Reference-Cited by-同舟云学术

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Design and application of a micro-force measuring system based on the principle of torsion balance

Published:2024-05 Issue: Volume:231 Page:114660
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Lou Xi,Ruan Jing,Lei Jian^ORCID,Guo Song,Liu Dabiao,He Yuming

Funder

Hubei Province Natural Science Foundation

National Natural Science Foundation of China

Publisher

Elsevier BV

Reference32 articles.

1. Development and application of high-end aerospace MEMS;Yuan;Front. Mech. Eng.,2017

2. Evolution of MEMS based micro inertial navigation systems;Li;J. Chin. Inertial Technol. Eng.,2004

3. CMOS MEMS fabrication technologies and Devices;Qu;Micromachines,2016

4. Packaging of bio-MEMS: strategies, technologies, and applications;Velten;IEEE Trans. Adv. Packag.,2005

5. Extending the travel range of analog-tuned electrostatic actuators;Hung;J. Microelectromech. Syst.,1999

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