On the modeling of a capacitive angular speed measurement sensor

Author:

Shah-Mohammadi-Azar Ali,Azimloo Hadi,Rezazadeh Ghader,Shabani Rasoul,Tousi Behrooz

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference27 articles.

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3. T.J. Brosnihan, A.P. Pisano, R.T. Howe, Surface micromachined angular accelerometer with force-feedback, in: Proceedings of the ASMED &C Division, San Francisco, CA, DSC 57–2, November, 1995, pp. 941–947.

4. On the modeling of a MEMS-based capacitive wall shear stress sensor;Rezazadeh;Measurement,2009

5. On a MEMS based dynamic remote temperature sensor using transverse vibration of a bi-layer micro-cantilever;Rezazadeh;Measurement,2012

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