Measurement and calibration of substrate surface temperature in hot filament chemical vapor deposition-Reference-Cited by-同舟云学术

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Measurement and calibration of substrate surface temperature in hot filament chemical vapor deposition

Published:2022-12 Issue: Volume:205 Page:112147
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Qiao Yu,Li Weihan,Chen Shifei,Wang Xinchang

Funder

Guangdong Science and Technology Department

Special Project for Research and Development in Key areas of Guangdong Province

Natural Science Foundation of Shanghai

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference34 articles.

1. Today's applications and future developments of coatings for drills and rotating cutting tools;Cselle;Surf. Coat. Technol.,1995

2. PVD/CVD technology for coating cemented carbides;Konyashin;Surf. Coat. Technol.,1995

3. CVD coatings based on medium temperature CVD κ- and α-Al2O3;Prengel;Surf. Coat. Technol.,1994

4. Low temperature CVD diamond deposition using halogenated precursors — deposition on low melting materials: Al, Zn and glass - ScienceDirect;Schmidt;Diam. Relat. Mater.,2001

5. Correlation of structural and optical properties of PVD grown amorphous carbon thin films;Solomon;Diam. Relat. Mater.,2017

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1. Development of a micro-infrared thermometry method for surface temperature distribution and variation of millimeter particle during high-temperature reaction;International Communications in Heat and Mass Transfer;2024-08

2. An investigation into low-temperature HFCVD and derivative techniques for the enhancement of diamond-coated cemented carbide tool performance;Surface and Coatings Technology;2024-03

3. Development of HFCVD apparatus for synthesizing diamond films with low thermal budget;Journal of Cleaner Production;2024-01

4. Cobalt diffusion during the initial stage of CVD diamond growth on cemented carbide – A molecular dynamics and experimental study;Applied Surface Science;2023-10

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