Newly developed standard conductance element for in situ calibration of high vacuum gauges-Reference-Cited by-同舟云学术

Newly developed standard conductance element for in situ calibration of high vacuum gauges

Published:2012-12 Issue:10 Volume:45 Page:2452-2455
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Yoshida Hajime,Arai Kenta,Akimichi Hitoshi,Kobata Tokihiko

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference6 articles.

1. H. Yoshida, K. Arai, M. Hirata, H. Akimichi, New leak element using sintered stainless steel filter for in situ calibration of ionization gauges and quadrupole mass spectrometers, Vacuum, in press.

2. Two-stage flow-dividing system for the calibration of vacuum gauges;Yoshida;J. Vac. Sci. Technol. A,2007

3. Relative ion gauge sensitivities to various hydrocarbon gases;Nakayama;Jpn. Appl. Phys.,1974

4. Simplified methods for the calculation of partial pressure using the relative ionization cross-section;Nakao;Vacuum,1975

5. Reliability of high vacuum measurements;Tilford;J. Vac. Sci. Technol. A,1983

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