Funder
National Natural Science Foundation of China
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference19 articles.
1. Temperature-insensitive dual-mode resonant sensors—A review;Vig;IEEE Sens. J.,2001
2. M.S. Weinberg, “How to invent (or not invent) the first silicon MEMS gyroscope”, Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on, IEEE, 2015.
3. Silicon microgyroscope temperature prediction and control system based on BP neural network and fuzzy –PID control method;Xia;Measurem. Sci. Technol.,2015
4. K. Shcheglov, C. Evans, R. Gutierrez, T.K. Tang, Temperature dependent characteristics of the JPL silicon MEMS gyroscope Aerospace Conference Proceedings, IEEE 1, 2000, 403–411.
5. Design and verification of a structure for isolating packaging stress in SOI MEMS devices;Hao;IEEE Sens. J.,2017
Cited by
21 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献