Funder
Austrian Research Promotion Agency
FFG
BRS
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Simple methods of edge position measurement using shadow projected on CCD sensor;Fischer;Meas. Sci. Rev.,2003
2. Dimension measurement of objects with circular cross section using point light sources and an image sensor without lens;Radil;Meas. IEEE,2007
3. Monitoring of the outer diameter of long items using the optical diffraction method;Fedorov;Tech. Phys.,2015
4. T. Jerman, R. Priewald, W. Leitgeb, A novel approach to optical wafer pre-alignment using innovative ranging edge detectors, in: Advanced Semiconductor Manufacturing Conference, 2012.
5. C. Mentin, R. Priewald, E. Brenner, Parameter estimation of a laser measurement device using particle swarm optimization, in: 22nd IMEKO TC4 International Symposium and 20th International Workshop on ADC Modelling and Testing, 2017.
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