Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference31 articles.
1. M. Madou, Scaling, Actuators, and Power in Miniaturized Systems, de Fundamentals of Microfabrication, The Science of Miniaturization, 2nd edition ed., Boca Raton, CRC Press, 2002, pp. 407-448.
2. A. Frazier, R. Warrington y C. Friedrich, The miniaturization technologies: past, present, and future, IEEE Transactions on Industrial Electronics, vol. 42, n° 5, pp. 423 - 430, 1995.
3. A. Mínguez Martínez, C. Gómez Pérez, D. Canteli Pérez-Caballero, L. Carcedo Cerezo y J. de Vicente y Oliva, Design of Industrial Standards for the Calibration of Optical Microscopes, Materials, vol. 14 (1), n° 29, 2021.
4. Advanced 3D micromachining techniques using UV laser sources;Molpeceres;Microelectron. Eng.,2007
5. Fundamental Principles of Engineering Nanometrology;Leach,2010