Capacitance measurement via mechanical self-excited vibration of a cantilever in the electrostatic field-Reference-Cited by-同舟云学术

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Capacitance measurement via mechanical self-excited vibration of a cantilever in the electrostatic field

Published:2022-11 Issue: Volume:204 Page:112048
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Liu Zhiwei,Zhan Wencheng,Zhu Yangsheng,Qi Mingjing,Leng Jiaming,Yan Xiaojun

Funder

Higher Education Discipline Innovation Project

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference42 articles.

1. Label-free cancer markers detection by capacitance biochip;Carrara;Sens. Actuators, B: Chem.,2009

2. Progress in achieving high-performance piezoresistive and capacitive flexible pressure sensors: A review;Chen;J. Mater. Sci. Technol.,2020

3. A Review of the Capacitive MEMS for Seismology;D'Alessandro;Sensors,2019

4. CMOS based capacitive sensors for life science applications: A review;Forouhi;Sens. Actuators, A: Phys.,2019

5. Three-dimensional micro-displacement measurement method based on capacitance-grating sensor;Li;Measurement,2022

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