CEMS study of iron disilicide formation by iron ion implantation into silicon-Reference-Cited by-同舟云学术

CEMS study of iron disilicide formation by iron ion implantation into silicon

Published:1999-09 Issue:4 Volume:155 Page:468-478
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Dobler M,Reuther H

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference30 articles.

1. T.B. Massalski, in: Binary Alloy Phase Diagrams, American Society for Metals, Metal Park, OH, 1986

2. R.W. Fathauer, S. Mantl, L.J. Schowalter, K.N. Tu (Eds.), in: Silicides, Germanides and their Interfaces, MRS Proc. vol. 320, 1994

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2. Magnetism in Ge by ion implantation with Fe and Mn;Journal of Physics D: Applied Physics;2012-09-13

3. High-energy ion implantation of iron in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-12

4. Investigation of 70 MeV iron irradiation induced defects in C-silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-11

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