The dependence of stress in IBAD films on the ion-irradiation energy and flux
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering
2. Intrinsic stress in sputtered thin films
3. Ion induced stress generation in arc‐evaporated TiN films
4. A simple model for the formation of compressive stress in thin films by ion bombardment
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