Application of secondary neutral mass spectrometry in low-energy sputtering yield measurements-Reference-Cited by-同舟云学术

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Application of secondary neutral mass spectrometry in low-energy sputtering yield measurements

Published:1997-06 Issue:1 Volume:129 Page:123-129
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Bhattacharjee S.,Zhang J.,Shutthanandan V.,Ray P.K.,Shivaparan N.R.,Smith R.J.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference21 articles.

1. Sputtering by Particle Bombardment I;Andersen,1981

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1. Analysis of Sputtering Yield Measurements for Ion Thruster Grid Materials;AIAA Journal;2023-07

2. Sputter yield measurements of thin foils using scanning transmission ion microscopy;The European Physical Journal D;2015-01

3. Sputtering yields for low-energy Ar+- and Ne+-ion bombardment;Vacuum;2012-07

4. Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence;The European Physical Journal D;2011-02

5. Enhanced sputtering yields of carbon due to accumulation of low-energy Xe ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-05

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