Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy-Reference-Cited by-同舟云学术

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Modeling of deep buried structures in high-power devices based on proton beam induced charge microscopy

Published:2003-09 Issue: Volume:210 Page:164-168
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Zmeck M.,Balk L.,Osipowicz T.,Watt F.,Phang J.,Khambadkone A.,Niedernostheide F.-J.,Schulze H.-J.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference3 articles.

1. Radiation Detection and Measurement;Knoll,1999

2. Materials Analysis Using a Nuclear Microprobe;Breese,1996

3. Analysis of high-power devices using proton beam induced currents

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