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Molecular-dynamics simulation of sputtering

Published:1997-02 Issue:3 Volume:122 Page:427-441
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Urbassek Herbert M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference158 articles.

1. Sputtering by particle bombardment I,1981

2. Sputtering by particle bombardment II,1983

3. Sputtering by particle bombardment III,1991

4. Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92),1993

5. Pulsed Laser Deposition of Thin Films;Kelly,1994

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