The failure mechanisms and phase formation for Ni, Co and Cu contacts on ion implanted ()Si under high current stress-Reference-Cited by-同舟云学术

The failure mechanisms and phase formation for Ni, Co and Cu contacts on ion implanted ()Si under high current stress

Published:2000-06 Issue:1-4 Volume:169 Page:161-165
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Lin H.H,Cheng S.L,Chen L.J

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference17 articles.

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3. H.H. Lin, K.N. Chen, S.L. Cheng, Y.C. Peng, G.H. Shen, C.R. Chen, L.J. Chen, in: Proceedings of the 1998 International Electron Device and Material Symposium, Tainan, Taiwan, C2-6, 1998, p. 254

4. H.H. Lin, K.N. Chen, S.L. Cheng, Y.C. Peng, G.H. Shen, C.R. Chen, L.J. Chen, J. Korean Phys. Soc. (1999), in press

5. L.J. Chen, K.N. Chen, H.H. Lin, S.L. Cheng, Y.C. Peng, G.H. Shen, C.R. Chen, in: Proceedings of the 1998 Ion Implantation Technical Symposium, Kyoto, Japan, 1999, in press

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