Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals-Reference-Cited by-同舟云学术

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Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

Published:2001-05 Issue:1-4 Volume:178 Page:220-223
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hammerl C,Rauschenbach B

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Characterization of oxide layers induced by oxygen ion implantation into Ti, V, Cr, Zr, Nb, Mo, Hf, Ta and W

2. Transition Metal Oxides;Rao,1995

3. W. Moeller, TRIDYN, Version 4.0, Dynamic Composition TRIM Program, 1989

4. Formation of buried oxide layers in molybdenum by high-fluence oxygen ion implantation

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Change of sheet resistance of high purity alumina ceramics implanted by Cu and Ti ions;Applied Surface Science;2005-11

2. In situ X-ray diffraction investigations during high-energy oxygen ion implantation in transition metals;Vacuum;2004-11

3. Structure and properties of molybdenum implanted with high-flux carbon ion;Applied Surface Science;2003-12

4. Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-05

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