Low temperature characterization of AlSi diffusion kinetics
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Determination of the Solubility of Si in Dilute AlSi; Alloys by Low-Temperature Resistivity Measurements;Kovacs-Csetenyi;Phys. Stat. Sol.,1966
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3. Precipitation of Si from the Al Metallization of Integrated Circuits;McCaldin;Appl. Phys. Lett.,1972
4. Diffusion-Limited Si Precipitation in Evaporated Al/Si Films Couples;Van Gurp;J. Appl. Phys.,1973
5. Accelerated Aging of Al/Ge and Al/Si Thin Film Couples;Mgbenu;Thin Solid Films,1980
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