Author:
Dilhac J.-M.,Ganibal C.,Nolhier N.,Moynagh P.B.,Chew C.P.,Rosser P.J.
Reference8 articles.
1. Single-wafer integrated semiconductor device processing
2. F. Roozeboom Rapid Thermal Processing Science and Technology, Ed. R.B. Fair (Academic Press, New York), to be published.
3. J.-M. Dilhac, N. Nolhier and C. Ganibal Proc. ESSDERC 90, Eds. W. Eccleston and P.J. Rosser (Hilger, Bristol, 1990) p. 65.
4. Insitureflectivity measurement in a rapid thermal processor for the study of platinum silicide formation
5. In situ silicon solid state regrowth kinetics measurement in a rapid thermal processor