Author:
Nowak R.,Metev S.,Sepold G.
Reference13 articles.
1. Laser-Assisted Microtechnology;Metev,1994
2. Laser Chemical Processing;Bäuerle,1986
3. Laser Microfabrication;Ehrlich,1989
4. Laser controlled etching of aluminium;Tsao;Appl. Phys. Lett.,1983
5. Laser-assisted liquid-phase etching of copper conductors and its application to advanced integrated circuit interconnect;Miracky;Mater. Res. Soc. Symp. Proc.,1988