Author:
Peev G.,Zambov L.,Yanakiev Y.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference32 articles.
1. Modeling of Low‐Pressure CVD Processes
2. Modeling and Analysis of Low Pressure CVD Reactors
3. Analysis of Multicomponent LPCVD Processes: Deposition of Pure and In Situ Doped Poly‐Si
4. K.F. Jensen, in Proc. 9th Intern. Conf. on CVD, Cincinnati, OH, May 1984, p. 3.
5. K.F. Roenigk, K.F. Jensen and D.J. Syverson, in: Proc. 5th European Conf. on CVD, Uppsala, Sweden, June 1985, p. 207.
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