Axial dopant distribution and its control in bulk crystal growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference5 articles.
1. Low Oxygen Content Czochralski Silicon Crystal Growth
2. Review of Rapid Thermal Annealing of Ion Implanted GaAs
3. Doping of Silicon by Neutron Irradiation
4. Fundamentals of Microelectronics Processing;Lee,1990
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1. Axial Distribution of Gallium in Silicon Crystals for Photovoltaic Applications;Japanese Journal of Applied Physics;2007-05-08
2. Quality evaluation of resistivity-controlled silicon crystals;Journal of Crystal Growth;2006-01
3. Resistivity distribution of silicon single crystals using codoping;Journal of Crystal Growth;2005-07
4. Resistivity distribution in bulk growth of silicon single crystals;Journal of Crystal Growth;2005-02
5. Two-dimensional analysis of axial segregation in batchwise and continuous Czochralski process;Journal of Crystal Growth;1999-03
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