The preparation of transparent ZnO: Al thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference5 articles.
1. Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
2. Highly conductive and transparent zinc oxide films prepared by rf magnetron sputtering under an applied external magnetic field
3. Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
4. Aging characteristics of conducting and transparent thin film of Al doped ZnO.
5. Facing targets type of sputtering method for deposition of magnetic metal films at low temperature and high rate
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1. Fabrication of highly transparent Al-ion-implanted ZnO thin films by metal vapor vacuum arc method;Japanese Journal of Applied Physics;2017-02-10
2. Intrinsic and extrinsic doping of ZnO and ZnO alloys;Journal of Physics D: Applied Physics;2016-09-16
3. Study of a sandwich structure of transparent conducting oxide films prepared by electron beam evaporation at room temperature;Nanoscale Research Letters;2012-06-14
4. Microstructure and characterization of Al-doped ZnO films prepared by RF power sputtering on Al and ZnO targets;Applied Surface Science;2012-06
5. Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition;Journal of Materials Research;2011-11-07
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