Vapor phase growth of stabilized zirconia crystals by hydrolysis of zirconium fluoride
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference9 articles.
1. Preparation and Properties of Pyrolytic Zirconium Dioxide Films
2. Thin films of metal oxides on silicon by chemical vapor deposition with organometallic compounds. I
3. The chemical vapour deposition and characterization of ZrO2 films from organometallic compounds
4. The Characteristics of Growth of Films of Zirconium and Hafnium Oxides (ZrO2, HfO2) by Thermal Decomposition of Zirconium and Hafnium β‐Diketonate Complexes in the Presence and Absence of Oxygen
5. Y2O3, ZrO2 and Stabilized ZrO2 Films Prepared by Chemical Vapor Deposition
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