Adsorption on Si(111) during CVD of silicon from silane: The effect of temperature, bond strength, supersaturation and pressure
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference31 articles.
1. Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1
2. The adsorption of PH3 on Si(100) and its effect on the coadsorption of SiH4
3. Theoretical analysis of equilibrium adsorption layers in CVD systems (Si-H-Cl, Ga-As-H-Cl)
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